{"product_id":"ieej-bta2025-3-d-a1-2","title":"【Invited】Imaging of nanopatterns assisted by polymeric microstructures produced by proton beam writing","description":"\u003cp\u003e\u003cstrong\u003eカテゴリ：\u003c\/strong\u003e部門大会\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e論文No：\u003c\/strong\u003e3-D-a1-2\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eグループ名：\u003c\/strong\u003e【A】令和７年電気学会基礎・材料・共通部門大会\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e発行日：\u003c\/strong\u003e2025\/8\/27\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eタイトル(英語)：\u003c\/strong\u003e\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e著者名：\u003c\/strong\u003ePuttaraksa Nitipon(Shibaura Institute of Technology), Sano Taichi(1Shibaura Institute of Technology), Shiraishi Yuto(Shibaura Institute of Technology), Kosumsupamala Kunpisit(Shibaura Institute of Technology), Seki Hironori(Shibaura Institute of Technology), Nishikawa Hiroyuki(Shibaura Institute of Technology), Okubo Shota(Mie University), Tsuji Akihiro(Mie University), Matsui Tatsunosuke(Mie University)　  \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e著者名(英語)： \u003c\/strong\u003e\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eキーワード：\u003c\/strong\u003eProton beam writing,Microstructure-assisted microscopy\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e要約(日本語)：\u003c\/strong\u003eIt has been realized that the nature of diffraction of light in an optical microscope causes a challenge in imaging nanometer-sized structures\/patterns below ~200 nm by using visible light. To date, many approaches have practically been demonstrated to solve this issue. Our research team has used proton beam writing to create microstructures of the polymer resists directly on the Blu-ray disc surfaces to assist in nanopattern imaging. The performance of this nanoimaging assistance has been explored under a laser confocal microscope. We will present this investigation in this meeting.\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003ePDFファイルサイズ：\u003c\/strong\u003e233Kバイト\u003c\/p\u003e","brand":"IEEJ-PDF","offers":[{"title":"PDFダウンロード（一般価格440円\/会員価格220円） \/ A4 \/ 1","offer_id":49643089461487,"sku":"IEEJ-BTA2025-3-D-a1-2-PDF","price":440.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0718\/9512\/2159\/files\/IEEJ-PDF_bumontaikai_86e1e5b8-dd4f-4ca9-adf2-9c7d1264bbe8.png?v=1780541796","url":"https:\/\/ieej.bookpark.ne.jp\/products\/ieej-bta2025-3-d-a1-2","provider":"電気学会 電子図書館","version":"1.0","type":"link"}