{"product_id":"ieej-mag14115","title":"SrTiO薄膜を用いた伝送線路型薄膜磁界センサの開発","description":"\u003cp\u003e\u003cstrong\u003eカテゴリ: \u003c\/strong\u003e研究会(論文単位)\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e論文No: \u003c\/strong\u003eMAG14115\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eグループ名: \u003c\/strong\u003e【A】基礎・材料・共通部門 マグネティックス研究会\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e発行日: \u003c\/strong\u003e2014\/08\/08\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eタイトル(英語): \u003c\/strong\u003eCoplanar Line Thin Film Sensor Using SrTiO film\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e著者名: \u003c\/strong\u003e植竹 宏明(東北学院大学),川上 敏弥(東北学院大学),薮上 信(東北学院大学),小澤 哲也(東北学院大学),小林 伸聖(電磁材料研究所),荒井 賢一(電磁材料研究所)\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e著者名(英語): \u003c\/strong\u003eUetake Hiroaki(Tohoku Gakuin University),Kawakami Toshiya(Tohoku Gakuin University),Yabukami Shin(Tohoku Gakuin University),Ozawa Tetsuya(Tohoku Gakuin University),Kobayashi Nobukiyo(Research Institute for Electric and Magnetic Materials),Arai Ken Ichi (Research Institute for Electric and Magnetic Materials)\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e要約(日本語): \u003c\/strong\u003e高誘電率を有するSrTiO薄膜を用いたコプレーナ線路とCoNbZr薄膜を組み合わせた薄膜磁界センサを試作し，位相計測型センサの高感度化をはかった。\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e要約(英語): \u003c\/strong\u003eA very sensitive thin film sensor was developed using a coplanar line fabricated from SrTiO film, amorphous CoNbZr film and Cu\/Cr film. This film enhanced the sensitivity of the magnetic field sensor, a phase change of more than 100 degrees\/Oe and gain of over -40 dB being achieved simultaneously. The sensor with SrTiO film enhanced the sensitivity about 1.6 times greater than that with SiO2 film because of the high permittivity of the SrTiO film. The sensitivity of the sensor increased with increasing thickness of the SrTiO film, a thickness of around 3 micro m being sufficient for enhancement of the sensitivity.\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e原稿種別: \u003c\/strong\u003e日本語\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003ePDFファイルサイズ: \u003c\/strong\u003e1,105 Kバイト\u003c\/p\u003e","brand":"IEEJ-PDF","offers":[{"title":"PDFダウンロード（一般価格330円\/会員価格220円） \/ A4 \/ 4","offer_id":46385064149231,"sku":"IEEJ-MAG14115-PDF","price":330.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0718\/9512\/2159\/files\/IEEJ-PDF_186c601e-9989-470f-90fc-49c58093c3df.png?v=1744334207","url":"https:\/\/ieej.bookpark.ne.jp\/products\/ieej-mag14115","provider":"電気学会 電子図書館","version":"1.0","type":"link"}