{"product_id":"ieej-ppt07044","title":"Extreme-ultraviolet Intensity of Discharge-based Lithium Plasma for Lithography","description":"\u003cp\u003e\u003cstrong\u003eカテゴリ: \u003c\/strong\u003e研究会(論文単位)\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e論文No: \u003c\/strong\u003ePPT07044\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eグループ名: \u003c\/strong\u003e【A】基礎・材料・共通部門　パルスパワー研究会\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e発行日: \u003c\/strong\u003e2007\/11\/26\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eタイトル(英語): \u003c\/strong\u003eExtreme-ultraviolet Intensity of Discharge-based Lithium Plasma for Lithography\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e著者名: \u003c\/strong\u003eMajid Masnavi(Tokyo Institute of Technology),Mitsuo Nakajima(Tokyo Institute of Technology),Tohru Kawamura(Tokyo Institute of Technology),Eiki Hotta(Tokyo Institute of Technology),Kazuhiko Horioka(Tokyo Institute of Technology)\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e著者名(英語): \u003c\/strong\u003eMajid Masnavi(Tokyo Institute of Technology),Mitsuo Nakajima(Tokyo Institute of Technology),Tohru Kawamura(Tokyo Institute of Technology),Eiki Hotta(Tokyo Institute of Technology),Kazuhiko Horioka(Tokyo Institute of Technology)\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eキーワード: \u003c\/strong\u003eExtreme-ultraviolet lithography|Discharge-based plasmas|Conversion efficiency|Collisional-radiative model|Lyman-α line|Extreme-ultraviolet lithography|Discharge-based plasmas|Conversion efficiency|Collisional-radiative model|Lyman-α line\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e原稿種別: \u003c\/strong\u003e日本語\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003ePDFファイルサイズ: \u003c\/strong\u003e566 Kバイト\u003c\/p\u003e","brand":"IEEJ-PDF","offers":[{"title":"PDFダウンロード（一般価格330円\/会員価格220円） \/ A4 \/ 9","offer_id":46359284973807,"sku":"IEEJ-PPT07044-PDF","price":330.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0718\/9512\/2159\/files\/IEEJ-PDF_3ed55987-51d1-4639-8a0f-c8fcbefa0f7a.png?v=1743474290","url":"https:\/\/ieej.bookpark.ne.jp\/products\/ieej-ppt07044","provider":"電気学会 電子図書館","version":"1.0","type":"link"}