{"product_id":"ieej-pst08011","title":"Electrical characteristics of the hybrid plasma of 195 kHz-burst RF plasma with arc-free HPPS glow plasma in reactive gases","description":"\u003cp\u003e\u003cstrong\u003eカテゴリ: \u003c\/strong\u003e研究会(論文単位)\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e論文No: \u003c\/strong\u003ePST08011\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eグループ名: \u003c\/strong\u003e【A】基礎・材料・共通部門　プラズマ研究会\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e発行日: \u003c\/strong\u003e2008\/01\/26\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eタイトル(英語): \u003c\/strong\u003eElectrical characteristics of the hybrid plasma of 195 kHz-burst RF plasma with arc-free HPPS glow plasma in reactive gases\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e著者名: \u003c\/strong\u003eKen Yukimura(Doshisha University),Ryosuke Mieda(Doshisha University),Kingo Azuma(University of Hyogo),Hiroshi Tamagaki(KOBE STEEL,LTD),Tadao Okimoto(KOBE STEEL,LTD)\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e著者名(英語): \u003c\/strong\u003eKen Yukimura(Doshisha University),Ryosuke Mieda(Doshisha University),Kingo Azuma(University of Hyogo),Hiroshi Tamagaki(KOBE STEEL,LTD),Tadao Okimoto(KOBE STEEL,LTD)\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eキーワード: \u003c\/strong\u003eHPPS|HIPIMS|HPPMS|Glow plasma|sputtering|magnetron sputter|RF plasma|HPPS|HIPIMS|HPPMS|Glow plasma|sputtering|magnetron sputter|RF plasma\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e原稿種別: \u003c\/strong\u003e日本語\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003ePDFファイルサイズ: \u003c\/strong\u003e859 Kバイト\u003c\/p\u003e","brand":"IEEJ-PDF","offers":[{"title":"PDFダウンロード（一般価格330円\/会員価格220円） \/ A4 \/ 8","offer_id":46359331274991,"sku":"IEEJ-PST08011-PDF","price":330.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0718\/9512\/2159\/files\/IEEJ-PDF_a7da71ab-e305-4c96-9a24-ad95922a96c5.png?v=1743476848","url":"https:\/\/ieej.bookpark.ne.jp\/products\/ieej-pst08011","provider":"電気学会 電子図書館","version":"1.0","type":"link"}