{"product_id":"ieej-samcon2026-ss2-1","title":"Implementation of Fast and Energy Efficient Temperature Control for a Semiconductor Vertical Furnace with an Inside Heater","description":"\u003cp\u003e\u003cstrong\u003eカテゴリ：\u003c\/strong\u003e国際会議\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e論文No：\u003c\/strong\u003e\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eグループ名：\u003c\/strong\u003eSAMCON2026\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e発行日：\u003c\/strong\u003e2026\/3\/3\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eタイトル(英語)：\u003c\/strong\u003eImplementation of Fast and Energy Efficient Temperature Control for a Semiconductor Vertical Furnace with an Inside Heater\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e著者名：\u003c\/strong\u003eKoma Nishioka (The University of Tokyo); Christian Milleneuve Budiono, Wataru Ohnishi and Takafumi Koseki (The University of Tokyo, Japan); Akira Hirata and Tatsuya Yamaguchi (Tokyo Electron Technology Solutions Ltd, Japan)\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eキーワード：\u003c\/strong\u003e\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e要約(英語)：\u003c\/strong\u003e\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e原稿種別：\u003c\/strong\u003e英語\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003ePDFファイルサイズ：\u003c\/strong\u003e1,131Kバイト\u003c\/p\u003e","brand":"IEEJ-PDF","offers":[{"title":"PDFダウンロード（一般価格330円\/会員価格220円） \/ A4 \/ 6","offer_id":48021676523759,"sku":"IEEJ-SAMCON2026-SS2-1-PDF","price":330.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0718\/9512\/2159\/files\/IEEJ-PDF_bumontaikai_f7363745-7997-446e-ba9a-011c56e92918.png?v=1773829775","url":"https:\/\/ieej.bookpark.ne.jp\/products\/ieej-samcon2026-ss2-1","provider":"電気学会 電子図書館","version":"1.0","type":"link"}