{"product_id":"ieej-zt011236","title":"Large Area Electron-Beam-Excited Plasma ( EBEP ) of Meter Size","description":"\u003cp\u003e\u003cstrong\u003eカテゴリ: \u003c\/strong\u003e全国大会\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e論文No: \u003c\/strong\u003e1-236\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eグループ名: \u003c\/strong\u003e【全国大会】平成13年電気学会全国大会論文集\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e発行日: \u003c\/strong\u003e2001\/03\/21\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eタイトル(英語): \u003c\/strong\u003eLarge Area Electron-Beam-Excited Plasma ( EBEP ) of Meter Size\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e著者名: \u003c\/strong\u003eShunjiro Ikezawa(Chubu University),Halida Homyara(Chubu University),Kiyohide Baba(Chubu University),Toshitaro Yoshioka(Chubu University),Keiji Nakamura(Chubu University),Tosin Famakinwa(Kiev Polytech. Institute),Hirobumi Oda(Itoh Optical Indust. Co. Ltd),Kazuki Yoshimura(National Indust. Research Inst. Nagoya),Hiroshi Taoda(National Indust. Research Inst. Nagoya)\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e著者名(英語): \u003c\/strong\u003eShunjiro Ikezawa(Chubu University),Halida Homyara(Chubu University),Kiyohide Baba(Chubu University),Toshitaro Yoshioka(Chubu University),Keiji Nakamura(Chubu University),Tosin Famakinwa(Kiev Polytech. Institute),Hirobumi Oda(Itoh Optical Indust. Co. Ltd),Kazuki Yoshimura(National Indust. Research Inst. Nagoya),Hiroshi Taoda(National Indust. Research Inst. Nagoya)\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e要約(日本語): \u003c\/strong\u003eIn order to coat TiO2 film over large area for an industrial application, we have developed a large area electron-beam-excited plasma (EBEP) of meter size. Taking advantage of the remarkable features of controlled-EBEP, the composition and the thickness o\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e原稿種別: \u003c\/strong\u003e日本語\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003ePDFファイルサイズ: \u003c\/strong\u003e103 Kバイト\u003c\/p\u003e","brand":"IEEJ-PDF","offers":[{"title":"PDFダウンロード（一般価格440円\/会員価格220円） \/ A4 \/ 1","offer_id":46395686781167,"sku":"IEEJ-ZT011236-PDF","price":440.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0718\/9512\/2159\/files\/IEEJ-PDF_32284ddd-75d4-4e44-8a51-542cdfd6dbdb.png?v=1744785533","url":"https:\/\/ieej.bookpark.ne.jp\/products\/ieej-zt011236","provider":"電気学会 電子図書館","version":"1.0","type":"link"}