{"product_id":"ieej-zt012163","title":"C-S-Au Composite Film Formed by RF Plasma CVD and Sputtering","description":"\u003cp\u003e\u003cstrong\u003eカテゴリ: \u003c\/strong\u003e全国大会\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e論文No: \u003c\/strong\u003e2-163\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eグループ名: \u003c\/strong\u003e【全国大会】平成13年電気学会全国大会論文集\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e発行日: \u003c\/strong\u003e2001\/03\/21\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eタイトル(英語): \u003c\/strong\u003eC-S-Au Composite Film Formed by RF Plasma CVD and Sputtering  \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e著者名: \u003c\/strong\u003eMd. Abul Kashem (名古屋大学),松下 雅樹(名南工業高等学校),森田 慎三(名古屋大学)\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e著者名(英語): \u003c\/strong\u003eMd. Abul Kashem (Nagoya University),masaki Matushita(Meinan Technical High School),Shinzo Morita(Nagoya University)\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eキーワード: \u003c\/strong\u003eC-S-Au混合膜|ＲＦプラズマＣＶＤ|スパッタリング|屈折率\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e要約(日本語): \u003c\/strong\u003ePreviously C-S compound thin film was formed by RF plasma CVD withusing CH4, SF6 and Ar mixture gas. The refractive index of the film was varied from 2 to 3 with increasing sulfur density from 0 to 30 atomic %. In this work, Au atom was aimed to be in\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e原稿種別: \u003c\/strong\u003e日本語\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003ePDFファイルサイズ: \u003c\/strong\u003e100 Kバイト\u003c\/p\u003e","brand":"IEEJ-PDF","offers":[{"title":"PDFダウンロード（一般価格440円\/会員価格220円） \/ A4 \/ 1","offer_id":46395723907311,"sku":"IEEJ-ZT012163-PDF","price":440.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0718\/9512\/2159\/files\/IEEJ-PDF_f050d489-69f1-4e18-8186-a6e378d1043c.png?v=1744786920","url":"https:\/\/ieej.bookpark.ne.jp\/products\/ieej-zt012163","provider":"電気学会 電子図書館","version":"1.0","type":"link"}