{"product_id":"ieej-zt021142","title":"Electrical Properties of Fluorocarbon Polymer Films Obtained by Plasma Enhanced Chemical Vapor Deposition","description":"\u003cp\u003e\u003cstrong\u003eカテゴリ: \u003c\/strong\u003e全国大会\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e論文No: \u003c\/strong\u003e1-142\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eグループ名: \u003c\/strong\u003e【全国大会】平成14年電気学会全国大会論文集\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e発行日: \u003c\/strong\u003e2002\/03\/26\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eタイトル(英語): \u003c\/strong\u003eElectrical Properties of Fluorocarbon Polymer Films Obtained by Plasma Enhanced Chemical Vapor Deposition\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e著者名: \u003c\/strong\u003eCostel Biloiu(Hokkaido University),Ioana-Arabela Biloiu (Hokkaido University),Yosuke Sakai(Hokkaido University),Hirotake Sugawara(Hokkaido University)\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e著者名(英語): \u003c\/strong\u003eCostel Biloiu(Division of Electronics and Information Engineering,Hokkaido University),Ioana-Arabela Biloiu(Division of Electronics and Information Engineering,Hokkaido University),Yosuke Sakai(Division of Electronics and Information Engineering,Hokkaido University),Hirotake Sugawara(Division of Electronics and Information Engineering,Hokkaido University)\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eキーワード: \u003c\/strong\u003eプラズマCVD|絶縁破壊電圧|二次電子放出|絶縁膜|フルオロカーボン|プラズマ\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e要約(日本語): \u003c\/strong\u003eThe obtaining of fluorocarbon polymer films (FCPF) and their electrical proprieties are presented. FCPF have been deposited in a 13.56 MHz capacitively coupled reactor in two geometries: spherical and plan-parallel. As monomer gas perfluoro-octane C\u003csub\u003e8\u003c\/sub\u003eF\u003csub\u003e18\u003c\/sub\u003e diluted with Ar have been used. Investigation of electrical proprieties of these films reveals a low dielectric constant (\u0026lt;= 2.5) and a low dielectric loss (\u0026lt;=0.001) for a wide range of frequencies. From breakdown measurements in nitrogen and argon gases effective electron yield of the order 10\u003csup\u003e-5\u003c\/sup\u003e - 10\u003csup\u003e-6\u003c\/sup\u003e has been obtained. The measurement of intrinsic breakdown voltage of FCPF showed a dependency against film thickness similar with that for polytetrafluoroethylene films.\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e原稿種別: \u003c\/strong\u003e日本語\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003ePDFファイルサイズ: \u003c\/strong\u003e299 Kバイト\u003c\/p\u003e","brand":"IEEJ-PDF","offers":[{"title":"PDFダウンロード（一般価格440円\/会員価格220円） \/ A4 \/ 2","offer_id":46395917140207,"sku":"IEEJ-ZT021142-PDF","price":440.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0718\/9512\/2159\/files\/IEEJ-PDF_ff976436-0dee-47a2-8a22-8a015a88b7cf.png?v=1744795119","url":"https:\/\/ieej.bookpark.ne.jp\/products\/ieej-zt021142","provider":"電気学会 電子図書館","version":"1.0","type":"link"}