{"product_id":"ieej-zt021176","title":"Characteristics of a hydrogen plasma in a surface wave plasma CVD apparatus","description":"\u003cp\u003e\u003cstrong\u003eカテゴリ: \u003c\/strong\u003e全国大会\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e論文No: \u003c\/strong\u003e1-176\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eグループ名: \u003c\/strong\u003e【全国大会】平成14年電気学会全国大会論文集\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e発行日: \u003c\/strong\u003e2002\/03\/26\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eタイトル(英語): \u003c\/strong\u003eCharacteristics of a hydrogen plasma in a surface wave plasma CVD apparatus\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e著者名: \u003c\/strong\u003e金 載浩(東京大学),板垣 敏文(東京大学),桂井 誠(東京大学)\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e著者名(英語): \u003c\/strong\u003eJaeho Kim(University of Tokyo),Toshifumi Itagaki(University of Tokyo),Makoto Katsurai(University of Tokyo)\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eキーワード: \u003c\/strong\u003e表面波プラズマ|マイクロ波プラズマ|水素プラズマ|プラズマCVD|ラングミュアプローブ\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e要約(日本語): \u003c\/strong\u003eRecently hydrogen based plasma have been used for the deposition of thin films such as hydrogenated amorphous silicon, diamond-like hydrocarbon, and diamond. While a ring line dielectric surface wave plasma (RDL-SWP) apparatus have been considered as to be one of the next generation process plasma apparatus from various merits. In this study, to apply a RDL-SWP apparatus to a plasma chemical vapor deposition (CVD) the characteristics of hydrogen plasma were experimentally investigated. The profiles of electron density and electron temperature were measured using a movable Langmuir probe and the profiles were discussed.\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e原稿種別: \u003c\/strong\u003e日本語\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003ePDFファイルサイズ: \u003c\/strong\u003e157 Kバイト\u003c\/p\u003e","brand":"IEEJ-PDF","offers":[{"title":"PDFダウンロード（一般価格440円\/会員価格220円） \/ A4 \/ 1","offer_id":46395920417007,"sku":"IEEJ-ZT021176-PDF","price":440.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0718\/9512\/2159\/files\/IEEJ-PDF_f614919d-4c2c-4e7c-93bc-4de05151b371.png?v=1744795311","url":"https:\/\/ieej.bookpark.ne.jp\/products\/ieej-zt021176","provider":"電気学会 電子図書館","version":"1.0","type":"link"}