{"product_id":"ieej-zt031120","title":"Dynamics of E-H Mode Transition in Atmospheric Pressure RF Inductive Discharges","description":"\u003cp\u003e\u003cstrong\u003eカテゴリ: \u003c\/strong\u003e全国大会\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e論文No: \u003c\/strong\u003e1-120\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eグループ名: \u003c\/strong\u003e【全国大会】平成15年電気学会全国大会論文集\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e発行日: \u003c\/strong\u003e2003\/03\/17\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eタイトル(英語): \u003c\/strong\u003eDynamics of E-H Mode Transition in Atmospheric Pressure RF Inductive Discharges\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e著者名: \u003c\/strong\u003eM.A.Razzak (名古屋大学),近藤 健二(名古屋大学),上杉 喜彦(名古屋大学),高村 秀一(名古屋大学)\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e著者名(英語): \u003c\/strong\u003eM.A. Razzak(Nagoya University),Kenji Kondo(Nagoya University),Yoshihiko Uesugi(Nagoya University),Shuichi Takamura(Nagoya University)\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eキーワード: \u003c\/strong\u003eInductively Coupled Plasma|E-H mode transition|High pressure rf discharge|Electrostatic and electromagnetic discharge|SIT inverter power supply|Spark discharge technique\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e要約(日本語): \u003c\/strong\u003eRecently, attention has been renewed to investigate the dynamics of electrostatic (E) to electromagnetic (H) mode transition of high pressure Inductively Coupled Plasma (ICP). In this paper, the dynamics of E-H mode transition of high pressure (1atm) radio frequency (rf) Ar induction thermal plasma with a moderate rf power of about 3.5kW are investigated experimentally. High speed and CCD camera observations are performed to investigate the dynamics of E-H mode transition. The discharge developments are compared with that of absorbed power and plasma loading impedance. The transition parameters are measured as well.\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e原稿種別: \u003c\/strong\u003e日本語\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003ePDFファイルサイズ: \u003c\/strong\u003e735 Kバイト\u003c\/p\u003e","brand":"IEEJ-PDF","offers":[{"title":"PDFダウンロード（一般価格440円\/会員価格220円） \/ A4 \/ 1","offer_id":46396301246703,"sku":"IEEJ-ZT031120-PDF","price":440.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0718\/9512\/2159\/files\/IEEJ-PDF_7aab76ea-a5bb-4de6-b6c5-5ed21b5c050f.png?v=1744804191","url":"https:\/\/ieej.bookpark.ne.jp\/products\/ieej-zt031120","provider":"電気学会 電子図書館","version":"1.0","type":"link"}