{"product_id":"ieej-zt041198","title":"Efficient RF Induction Thermal Plasma Generation Using T-LCL Immittance Circuit","description":"\u003cp\u003e\u003cstrong\u003eカテゴリ: \u003c\/strong\u003e全国大会\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e論文No: \u003c\/strong\u003e1-198\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eグループ名: \u003c\/strong\u003e【全国大会】平成16年電気学会全国大会論文集\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e発行日: \u003c\/strong\u003e2004\/03\/17\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eタイトル(英語): \u003c\/strong\u003eEfficient RF Induction Thermal Plasma Generation Using T-LCL Immittance Circuit\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e著者名: \u003c\/strong\u003eAbdur Razzak(名古屋大学),鈴木 康広(名古屋大学),高村 秀一(名古屋大学),上杉 喜彦(金沢大学)\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e著者名(英語): \u003c\/strong\u003eAbdur Razzak(Nagoya University),Yasuhiro Suzuki(Nagoya University),Shuichi Takamura(Nagoya University),Yoshihiko Uesugi(Kanazawa University)\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eキーワード: \u003c\/strong\u003einductively coupled plasma|E-H mode transition|high pressure rf discharge|static induction transistor|immittance circuit\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e要約(日本語): \u003c\/strong\u003eIn a typical rf induction thermal plasma, a rapid increase of the coil loading impedance is observed during the dynamic changes from electrostatic (E) to electromagnetic (H) mode, and rf coil current is dropped abruptly when the load changes from the E-to-H mode thereby decreasing the absorbed power and thus the power coupling efficiency. In order to overcome these problems, a T-LCL immittance circuit cascading with the SIT inverter power source is employed to generate high-pressure efficient Ar induction thermal plasmas.\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e原稿種別: \u003c\/strong\u003e日本語\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003ePDFファイルサイズ: \u003c\/strong\u003e676 Kバイト\u003c\/p\u003e","brand":"IEEJ-PDF","offers":[{"title":"PDFダウンロード（一般価格440円\/会員価格220円） \/ A4 \/ 1","offer_id":46396577775855,"sku":"IEEJ-ZT041198-PDF","price":440.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0718\/9512\/2159\/files\/IEEJ-PDF_4ef06c63-e878-4029-b5a2-9115e50a0e36.png?v=1744813544","url":"https:\/\/ieej.bookpark.ne.jp\/products\/ieej-zt041198","provider":"電気学会 電子図書館","version":"1.0","type":"link"}