{"product_id":"ieej-zt143143","title":"3D Single Concave Vertex Anisotropic Etching Simulation for AT-cut Quartz Wafer","description":"\u003cp\u003e\u003cstrong\u003eカテゴリ: \u003c\/strong\u003e全国大会\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e論文No: \u003c\/strong\u003e3-143\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eグループ名: \u003c\/strong\u003e【全国大会】平成26年電気学会全国大会論文集\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e発行日: \u003c\/strong\u003e2014\/03\/05\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eタイトル(英語): \u003c\/strong\u003e3D Single Concave Vertex Anisotropic Etching Simulation for AT-cut Quartz Wafer\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e著者名: \u003c\/strong\u003e張 煜(早稲田大学),大井川 寛(早稲田大学),趙 萌(早稲田大学),池沢 聡(早稲田大学),植田 敏嗣(早稲田大学)\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e著者名(英語): \u003c\/strong\u003eYu Zhang(Waseda University),Hiroshi Oigawa(Waseda University),Meng Zhao(Waseda University),Satoshi Ikezawa(Waseda University),Toshitsugu Ueda(Waseda University)\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eキーワード: \u003c\/strong\u003eMEMS|crystal quartz wafer|anisotropic etching|3D etching simulation|hull construction|AT-cut\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e要約(日本語): \u003c\/strong\u003eQuartz crystal is acknowledged as one of suitable material for fabricating some specific MEMS devices as its excellent properties can complement those of silicon. This study mainly aims at establishing a user-friendly 3D etching simulator for quartz to better guide etching process and shorten developing period of quartz MEMS devices. We focus on etching simulation of 3D concave vertex of AT-cut wafer with improved database processing method and simulation method based on hull construction. The consistency between simulation result and experiment result shows that our method and process can well predict the 3D anisotropic etching profile of concave vertexes for AT-cut wafer.\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e原稿種別: \u003c\/strong\u003e日本語\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003ePDFファイルサイズ: \u003c\/strong\u003e194 Kバイト\u003c\/p\u003e","brand":"IEEJ-PDF","offers":[{"title":"PDFダウンロード（一般価格440円\/会員価格220円） \/ A4 \/ 1","offer_id":46399909921007,"sku":"IEEJ-ZT143143-PDF","price":440.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0718\/9512\/2159\/files\/IEEJ-PDF_544f78b8-1e97-4fd7-95a4-18b0754da96c.png?v=1744912657","url":"https:\/\/ieej.bookpark.ne.jp\/products\/ieej-zt143143","provider":"電気学会 電子図書館","version":"1.0","type":"link"}