{"product_id":"ieej-zt143151","title":"Ruのナノ摩擦現象のTEM観測","description":"\u003cp\u003e\u003cstrong\u003eカテゴリ: \u003c\/strong\u003e全国大会\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e論文No: \u003c\/strong\u003e3-151\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eグループ名: \u003c\/strong\u003e【全国大会】平成26年電気学会全国大会論文集\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e発行日: \u003c\/strong\u003e2014\/03\/05\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eタイトル(英語): \u003c\/strong\u003eTEM observation of nanoscale friction of Ru\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e著者名: \u003c\/strong\u003e赤尾 拓朗(東京大学生産技術研究所),鍋屋 信介(東京大学生産技術研究所),佐藤 隆昭(東京大学生産技術研究所),藤田 博之(東京大学生産技術研究所)\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e著者名(英語): \u003c\/strong\u003eTakurou Akao(Institute of Industrial Science,The University of Tokyo),Shinsuke Nabeya(Institute of Industrial Science,The University of Tokyo),Takaaki Sato(Institute of Industrial Science,The University of Tokyo),Hiroyuki Fujita(Institute of Industrial Science,The University of Tokyo)\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eキーワード: \u003c\/strong\u003eマイクロマシン|透過型電子顕微鏡|トライボロジー|ルテニウム|ナノコンタクト\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e要約(日本語): \u003c\/strong\u003eCurrently, multi-probe array devices have been studied actively for data storage and nano lithography. However, to make them practical, we have to elucidate three factors “ electrical contact, wear resistance, frictional force” in nanoscale. In this study, I aim to clarify the effect of friction and wear resistance. The way is observing the contacted RuO2 tips using the technique of MEMS-in-TEM in real time. In this article, I use the Ru for comparison of ruthenium dioxide. I succeeded to bring Ru tips into contact in nanoscale and observe it in real time during a tensile test. I calculated the friction force of Ru.\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e原稿種別: \u003c\/strong\u003e日本語\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003ePDFファイルサイズ: \u003c\/strong\u003e469 Kバイト\u003c\/p\u003e","brand":"IEEJ-PDF","offers":[{"title":"PDFダウンロード（一般価格440円\/会員価格220円） \/ A4 \/ 2","offer_id":46399910510831,"sku":"IEEJ-ZT143151-PDF","price":440.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0718\/9512\/2159\/files\/IEEJ-PDF_4e116969-6006-4372-85b7-905a74ad7e82.png?v=1744912697","url":"https:\/\/ieej.bookpark.ne.jp\/products\/ieej-zt143151","provider":"電気学会 電子図書館","version":"1.0","type":"link"}