{"product_id":"ieej-zt151094","title":"Development of a Planar Type of Modulated Induction Thermal Plasma with Two Split Coils","description":"\u003cp\u003e\u003cstrong\u003eカテゴリ: \u003c\/strong\u003e全国大会\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e論文No: \u003c\/strong\u003e1-094\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eグループ名: \u003c\/strong\u003e【全国大会】平成27年電気学会全国大会論文集\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e発行日: \u003c\/strong\u003e2015\/03\/05\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eタイトル(英語): \u003c\/strong\u003eDevelopment of a Planar Type of Modulated Induction Thermal Plasma with Two Split Coils\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e著者名: \u003c\/strong\u003eＳｕａｎ　Ｔｉａｌ Ｍａｉ　Ｋａｉ(金沢大学),Hiromitsu Irie(金沢大学),Yuji Maruyama(金沢大学),Yasunori Tanaka(金沢大学),Yoshihiko Uesugi(金沢大学),Tastuo Ishijima(金沢大学),Tetsuya Yukimoto(シー・ヴィ・リサーチ),Hiroshi Kawaura(シー・ヴィ・リサーチ)\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e著者名(英語): \u003c\/strong\u003eKai\/Suan\/Tial Mai(Kanazawa University),Hiromitsu\/Irie Irie(Kanazawa University),Maruyama Yuji(Kanazawa University),Yasunori Tanaka(Kanazawa University),Yoshihiko Uesugi(Kanazawa University),Tatsuo Ishijima(Kanazawa University),Tetsuya Yukimoto(CV Research Coorporation),Hiroshi Kawaura(CV Research Coorporation)\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eキーワード: \u003c\/strong\u003e熱プラズマ|発光スペクトル|変調|誘導プラズマ\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e要約(日本語): \u003c\/strong\u003eFor a large-area materials processing, we have so far developed a planar type of induction thermal plasma system with one coil .The system uses a rectangular-quartz vessel, instead of a cylindrical tube, with an air core coil or a ferrite core coil to produce ICTP with a planar shape. We introduce a newly developed planar type of ICTP coupled with two split coils supplied by two radio frequency inverters as power sources in order to generate a wider-spread and stable ICTP. In addition, the coil current was controlled alternatively to be supplied to each coil, leading to a modulated ICTP.\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e原稿種別: \u003c\/strong\u003e英語\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003ePDFファイルサイズ: \u003c\/strong\u003e191 Kバイト\u003c\/p\u003e","brand":"IEEJ-PDF","offers":[{"title":"PDFダウンロード（一般価格440円\/会員価格220円） \/ A4 \/ 1","offer_id":46400212533487,"sku":"IEEJ-ZT151094-PDF","price":440.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0718\/9512\/2159\/files\/IEEJ-PDF_b4f8ecbe-cf7a-484e-9456-999843acacd7.png?v=1744920019","url":"https:\/\/ieej.bookpark.ne.jp\/products\/ieej-zt151094","provider":"電気学会 電子図書館","version":"1.0","type":"link"}