An electromagnetic micromirror supported by metallic glass spring for large out-of-plane motion

カテゴリ: 研究会(論文単位)

論文No: MSS22029

グループ名: 【E】センサ・マイクロマシン部門 マイクロマシン・センサシステム研究会

発行日: 2022/06/04

タイトル(英語): An electromagnetic micromirror supported by metallic glass spring for large out-of-plane motion

著者名: Ou Chuan-Hui(東北大学),Nguyen Van Toan(東北大学),小野 崇人(東北大学)

著者名(英語): Chuan-Hui Ou(Tohoku University),Van Toan Nguyen(Tohoku University),Takahito Ono(Tohoku University)

キーワード: Micromirror|Electromagnetic|Metallic glass|Micro-interferometer

要約(日本語): This research presents an electromagnetic micromirror with a large stroke. The stroke can be several times larger than the existing electromagnetic micromirrors, and the angle of the micromirror is controllable, while most electromagnetic micromirrors can only achieve strokes under 200 μm per one-direction without a tilting angle control mechanism. The large stroke and controllable angle allow spectrometers to achieve higher resolution. Furthermore, a unique actuation structure is applied in this research. It is the first attempt to use metallic glass, as actuation electrical wires and mechanical structure simultaneously. A 418 μm displacement is achieved with the unique actuation structure.

要約(英語): This research presents an electromagnetic micromirror with a large stroke. The stroke can be several times larger than the existing electromagnetic micromirrors, and the angle of the micromirror is controllable, while most electromagnetic micromirrors can only achieve strokes under 200 μm per one-direction without a tilting angle control mechanism. The large stroke and controllable angle allow spectrometers to achieve higher resolution. Furthermore, a unique actuation structure is applied in this research. It is the first attempt to use metallic glass, as actuation electrical wires and mechanical structure simultaneously. A 418 μm displacement is achieved with the unique actuation structure.

本誌: 2022年6月7日-2022年6月8日マイクロマシン・センサシステム研究会

本誌掲載ページ: 19-21 p

原稿種別: 英語

PDFファイルサイズ: 857 Kバイト