Analysis of Heat Flux to Cathode Spot during Ambient Pressure Variation with Considering Non-Local-Thermal Equilibrium in Vacuum Arc

カテゴリ: 研究会(論文単位)

論文No: EPP22094,SP22029,HV22075

グループ名: 【A】基礎・材料・共通部門 放電・プラズマ・パルスパワー/【B】電力・エネルギー部門 開閉保護/【B】電力・エネルギー部門 高電圧合同研究会

発行日: 2022/11/18

タイトル(英語): Analysis of Heat Flux to Cathode Spot during Ambient Pressure Variation with Considering Non-Local-Thermal Equilibrium in Vacuum Arc

著者名: Suzuki Hiroto(Tokyo City University),Takagi Masahiro(Tokyo City University),Nemoto Yusuke(Tokyo City University),Morishita Honoka(Tokyo City University),Suzuki Yuki(Tokyo City University),Ren Zhenwei (Tokyo City University),Iwao Toru(Tokyo City University

著者名(英語): Hiroto Suzuki(Tokyo City University),Masahiro Takagi(Tokyo City University),Yusuke Nemoto(Tokyo City University),Honoka Morishita(Tokyo City University),Yuki Suzuki(Tokyo City University),Zhenwei Ren(Tokyo City University),Toru Iwao(Tokyo City University

キーワード: vacuum arc|cathode spot|non-local-thermal equilibrium|T-F electron emission|three-dimensional electromagnetic thermal fluid simulation|vacuum arc|cathode spot|non-local-thermal equilibrium|T-F electron emission|three-dimensional electromagnetic thermal fl

要約(日本語): Vacuum arc discharge is used in industrial applications such as oxide film processing. Because the time and cost of creating a vacuum environment is high, the development of controlling the movement of non-equilibrium cathode spots at atmospheric pressure is needed. However, the factors that cause the movement of cathode spot remains unelucidated. In this research, heat flux to cathode spot during ambient pressure variation with considering non-local-thermal equilibrium in vacuum arc was analyzed by three-dimensional electromagnetic thermal fluid simulation.

要約(英語): Vacuum arc discharge is used in industrial applications such as oxide film processing. Because the time and cost of creating a vacuum environment is high, the development of controlling the movement of non-equilibrium cathode spots at atmospheric pressure is needed. However, the factors that cause the movement of cathode spot remains unelucidated. In this research, heat flux to cathode spot during ambient pressure variation with considering non-local-thermal equilibrium in vacuum arc was analyzed by three-dimensional electromagnetic thermal fluid simulation.

本誌: 2022年11月21日-2022年11月22日放電・プラズマ・パルスパワー/開閉保護/高電圧合同研究会-1

本誌掲載ページ: 13-17 p

原稿種別: 英語

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