Design and Fabrication of the Metasurface Optical Gas Sensor Using Deep Ultraviolet Plasmon Resonance

カテゴリ: 研究会(論文単位)

論文No: MSS23018,CHS23014,BMS23006

グループ名: 【E】センサ・マイクロマシン部門 マイクロマシン・センサシステム/【E】センサ・マイクロマシン部門 ケミカルセンサ/【E】センサ・マイクロマシン部門 バイオ・マイクロシステム合同研究会

発行日: 2023/03/25

タイトル(英語): Design and Fabrication of the Metasurface Optical Gas Sensor Using Deep Ultraviolet Plasmon Resonance

著者名: Matsuda Ryo(Tokyo University if Agriculture and Technology),Watanabe Ryo(Tokyo University if Agriculture and Technology),Matsushita Kenichiro(MEIDENSHA CORPORATION),Ogawa Yuji(MEIDENSHA CORPORATION),Ikezawa Satoshi(Tokyo University of Agriculture and Tech

著者名(英語): Ryo Matsuda(Tokyo University of Agriculture and Technology),Ryo Watanabe(Tokyo University of Agriculture and Technology),Kenichiro Matsushita(MEIDENSHA CORPORATION),Yuji Ogawa(MEIDENSHA CORPORATION),Satoshi Ikezawa(Tokyo University of Agriculture and Tech

キーワード: Ｐｌａｓｍｏｎ　Ｒｅｓｏｎａｎｃｅ|Ｅｌｅｃｔｒｏｍａｇｎｅｔｉｃ　Ｆｉｅｌｄ　Ｃａｌｃｕｌａｔｉｏｎ|Ｄｅｅｐ　Ｕｌｔｒａｖｉｏｌｅｔ　Ｒｅｓｏｎａｎｃｅ|Ｎａｎｏｆａｂｒｉｃａｔｉｏｎ|Ｇａｓ　Ｓｅｎｓｏｒ|Ｍｅｔａｓｕｒｆａｃｅ|Plasmon Resonance|Electromagnetic Field Calculation|Deep Ultraviolet Resonance|Nanofabrication|Gas Sensor|Metasurface

要約(日本語): Acid corrosion inside high-voltage equipment has become a problem. Therefore, initial detection of gases such as ozone and ammonia, which are precursors to acids, is necessary. Optical gas sensors are suitable for initial detection of gases because they are non-contact, are not easily affected by the ambient environment, and can measure gases over time. In combination with metasurfaces, they are also expected to detect low-concentration gases. In this study, we design and fabricate an optical gas sensor and aim to contribute to the diagnosis of predictive deterioration of equipment.

要約(英語): Acid corrosion inside high-voltage equipment has become a problem. Therefore, initial detection of gases such as ozone and ammonia, which are precursors to acids, is necessary. Optical gas sensors are suitable for initial detection of gases because they are non-contact, are not easily affected by the ambient environment, and can measure gases over time. In combination with metasurfaces, they are also expected to detect low-concentration gases. In this study, we design and fabricate an optical gas sensor and aim to contribute to the diagnosis of predictive deterioration of equipment.

本誌: 2023年3月28日-2023年3月29日マイクロマシン・センサシステム/ケミカルセンサ/バイオ・マイクロシステム合同研究会

本誌掲載ページ: 21-24 p

原稿種別: 英語

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