Sensory evaluation of MEMS tactile display device with 7x7 SMA thick film actuator array

カテゴリ: 研究会(論文単位)

論文No: MSS24027,CHS24009,BMS24005

グループ名: 【E】センサ・マイクロマシン部門 マイクロマシン・センサシステム/【E】センサ・マイクロマシン部門 ケミカルセンサ/【E】センサ・マイクロマシン部門 バイオ・マイクロシステム合同研究会

発行日: 2024/03/25

タイトル(英語): Sensory evaluation of MEMS tactile display device with 7x7 SMA thick film actuator array

著者名: Mineta Takashi(Yamagata University),Amano Haruto(Yamagata University),Tagami Tatsuya(Yamagata University),Saito Ryo(Yamagata University)

著者名(英語): Takashi Mineta(Yamagata University),Haruto Amano(Yamagata University),Tatsuya Tagami(Yamagata University),Ryo Saito(Yamagata University)

キーワード: Tactile display|Shape memory alloy|actuator array|MEMS| Sensory evaluation|Tactile display|Shape memory alloy|actuator array|MEMS| Sensory evaluation

要約(日本語): A MEMS tatile display device with arrayed 7×7 SMA thick film actuators (1.5 mm pitch) and SU-8 lithographed mico-pin/cap structures was fabricated to validate the tactile presentaion on a finger skin performance. Sensrory evluation was conduced using completed tactile display device. All subjects was able to clearly detect the tactile stimuli at vibration frequency of 10-20 Hz even though only one pin was driven. When the location of the vibrating pins were moved in the device surface, the moving direction was easily detected.

要約(英語): A MEMS tatile display device with arrayed 7×7 SMA thick film actuators (1.5 mm pitch) and SU-8 lithographed mico-pin/cap structures was fabricated to validate the tactile presentaion on a finger skin performance. Sensrory evluation was conduced using completed tactile display device. All subjects was able to clearly detect the tactile stimuli at vibration frequency of 10-20 Hz even though only one pin was driven. When the location of the vibrating pins were moved in the device surface, the moving direction was easily detected.

本誌: 2024年3月28日-2024年3月30日マイクロマシン・センサシステム/ケミカルセンサ/バイオ・マイクロシステム合同研究会

本誌掲載ページ: 13-15 p

原稿種別: 英語

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