Proton beam writing for fabricating devices with microstructures to generate photonic nanojets

カテゴリ: 研究会(論文単位)

論文No: DEI25047

グループ名: 【A】基礎・材料・共通部門 誘電・絶縁材料研究会

発行日: 2025/01/06

タイトル(英語): Proton beam writing for fabricating devices with microstructures to generate photonic nanojets

著者名: Puttaraksa Nitipon(Shibaura Institute of Technology, Japan),Sano Taichi(Shibaura Institute of Technology, Japan),Tobe Keito(Shibaura Institute of Technology, Japan),Kosumsupamala Kunpisit(Shibaura Institute of Technology, Japan),Seki Hironori(Shibaura Ins

著者名(英語): Nitipon Puttaraksa(Shibaura Institute of Technology, Japan),Taichi Sano(Shibaura Institute of Technology, Japan),Keito Tobe(Shibaura Institute of Technology, Japan),Kunpisit Kosumsupamala(Shibaura Institute of Technology, Japan),Hironori Seki(Shibaura Institute of Technology, Japan),Akihiro Tsuji(Mie University, Japan),Shota Okubo(Mie University, Japan),Rikuto Hotta(Mie University, Japan),Tatsunosuke Matsui(Mie University, Japan),Hiroyuki Nishikawa(Shibaura Institute of Technology, Japan)

キーワード: Proton beam writing|Microstructures|Photonic nanojet|Proton beam writing|Microstructures|Photonic nanojet

要約(日本語): Microfabrication utilizing a focused MeV proton microbeam has been explored and is known as proton beam writing (PBW). We have used the PBW technique at Shibaura Institute of Technology in Japan to produce devices composed of microstructures in both negat

要約(英語): Microfabrication utilizing a focused MeV proton microbeam has been explored and is known as proton beam writing (PBW). We have used the PBW technique at Shibaura Institute of Technology in Japan to produce devices composed of microstructures in both negative tone photoresist (SU-8) and positive tone photoresist (poly(methyl methacrylate)/PMMA). The SU-8 and PMMA microstructure devices were accordingly applied to demonstrate a generation of photonic nanojets (PNJs) that are focused light by scattering at the microstructure shadows illuminated by a home-built confocal microscope apparatus at Mie University. In this meeting, we will present such microstructure devices and their PNJs.

本誌: 2025年1月9日-2025年1月10日誘電・絶縁材料研究会

本誌掲載ページ: 5-7 p

原稿種別: 英語