Observation of Membrane Sticking and Other Defects in Silicon-on-Nothing Structure

カテゴリ: 研究会(論文単位)

論文No: MSS25059,CHS25034,BMS25021

グループ名: 【E】センサ・マイクロマシン部門 マイクロマシン・センサシステム/【E】センサ・マイクロマシン部門 ケミカルセンサ/【E】センサ・マイクロマシン部門 バイオ・マイクロシステム合同研究会

発行日: 2025/05/26

タイトル(英語): Observation of Membrane Sticking and Other Defects in Silicon-on-Nothing Structure

著者名: Tang Zhengnan(Tohoku University),Vergara Andrea(Tohoku University),Tanaka Shuji(Tohoku University)

著者名(英語): Zhengnan Tang(Tohoku University),Andrea Vergara(Tohoku University),Shuji Tanaka(Tohoku University)

キーワード: micro electro mechanical system|silicon-on-nothing|hydrogen annealing|defects

要約(日本語): This paper discussed experimental observations on silicon-on-nothing (SON) structure formation. By high temperature annealing in hydrogen atmosphere, micro-trenches on the silicon surface reorganized into a sealed cavity under a silicon membrane. Few repo

要約(英語): This paper discussed experimental observations on silicon-on-nothing (SON) structure formation. By high temperature annealing in hydrogen atmosphere, micro-trenches on the silicon surface reorganized into a sealed cavity under a silicon membrane. Few reports are available on practical challenges of large-area SON application in MEMS device fabrication. In our experiment, it was found that SON membranes bent inward to the substrate, and even stuck to the substrate when membrane size was large. The membrane sticking phenomenon, together with defects on membranes, were investigated in detail by various observation methods. The aim of this work is to extend existing experimental results and provide new insights of large-area SON structure application on micro electro mechanical system (MEMS).

本誌: 2025年5月29日-2025年5月30日マイクロマシン・センサシステム/ケミカルセンサ/バイオ・マイクロシステム合同研究会

本誌掲載ページ: 5-7 p

原稿種別: 英語

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