Microfabrication based on Carbon Nanotubes-Nickel Composite for Scanning Micromirror

カテゴリ: 部門大会

論文No: 20pm3-PS009

グループ名: 第31回「センサ・マイクロマシンとその応用システム」シンポジウム論文集

発行日: 2014/10/14

タイトル(英語): Microfabrication based on Carbon Nanotubes-Nickel Composite for Scanning Micromirror

著者名: Zhonglie An(Tohoku University),Masaya Toda(Tohoku University),Go Yamamoto(Tohoku University),Toshiyuki Hashida(Tohoku University),Takahito Ono(Tohoku University)

キーワード: Micromirror,CNTs-Ni composite,Electroplating,Resonant frequency,Scanning angle

要約(英語): We present the fabrication and characterization of a silicon micromirror with CNTs-Ni composite beams, and evaluate the mechanical stability of the micromirror in terms of resonant frequency. The maximum variation of the resonant frequency of the micromirror during a long term stability test is about 0.3%, and its scanning angle is about 20o.

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