ピエゾ抵抗式半導体圧力センサの開発の道のり

カテゴリ: 部門大会

論文No: 22am2-B1

グループ名: 第31回「センサ・マイクロマシンとその応用システム」シンポジウム論文集

発行日: 2014/10/14

タイトル(英語): Road to Development of Piezoresistive Semiconductor Pressure Sensor

著者名: 杉山 進(立命館大学)

キーワード: ピエゾ抵抗式半導体圧力センサ,ひずみゲージ,マイクロマシニング,絶対圧型圧力センサ,拡散リード

要約(英語): Road of development of piezoresistive semiconductor pressure sensor has been watching retroactively. It is widely used as standard mature technology today, however, there was a fifty years history of the past. Innovation of semiconductor/IC technology and development of MEMS/micromachining have become the driving force of technological progress of semiconductor pressure sensor. This paper explores the road of technological innovation of semiconductor pressure sensor that is the foundation of the semiconductor sensors essential for automobile today.

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