<INVITED TALK> Development of Pixel-Parallel 3-D Integrated CMOS Image Sensors for Next-Generation Video Systems

カテゴリ: 部門大会

論文No: 24pm1-A-6

グループ名: 第33回「センサ・マイクロマシンとその応用システム」シンポジウム論文集

発行日: 2016/10/17

タイトル(英語): Development of Pixel-Parallel 3-D Integrated CMOS Image Sensors for Next-Generation Video Systems

著者名: 後藤 正英(ＮＨＫ放送技術研究所)

キーワード: image sensor,3-D integration,bonding,SOI,photodiode

要約(英語): We report on pixel-parallel 3-D integrated CMOS image sensors with 128 × 96 pixels. Photodiodes, A/D converters (ADCs), and 16-bit pulse counters on two SOI wafers are integrated by direct bonding through Au electrodes. We designed pulse-frequency-modulation ADCs. The developed sensor confirmed its excellent linearity with a dynamic range of 96 dB. Pixel-parallel video images were also obtained, demonstrating the feasibility of ultimate imaging devices for the next-generation video systems.

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