Magnetic field sensor based on vacuum packaged cantilever with a mounted magnet

カテゴリ: 部門大会

論文No: 25pm4-PS-060

グループ名: 第33回「センサ・マイクロマシンとその応用システム」シンポジウム論文集

発行日: 2016/10/17

タイトル(英語): Magnetic field sensor based on vacuum packaged cantilever with a mounted magnet

著者名: Xue Gaopeng(Tohoku University),Masaya(Tohoku University),Toda(Tohoku University),Nurasyikin Mohd(Tohoku University),Zhonglie(Tohoku University),An(Tohoku University),Nguyen Van(Tohoku University),Toan(Tohoku University),Takahito Ono(Tohoku University)

キーワード: Vacuum packaging,Cantilever magnetic sensor,Au-Au thermo-compression bonding,Magnetic field gradient measurement

要約(英語): The proposition of this research is to develop a vacuum packaged cantilever sensor with a small magnet for the measurements of magnetic force at atmospheric environment.

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