SIO2 OPTICAL WINDOW ON AN IMAGE SENSOR FOR OPTICAL MODULATOR

カテゴリ: 部門大会

論文No: 28am2-B-3

グループ名: 第32回「センサ・マイクロマシンとその応用システム」シンポジウム論文集

発行日: 2015/10/21

タイトル(英語): SIO2 OPTICAL WINDOW ON AN IMAGE SENSOR FOR OPTICAL MODULATOR

著者名: Toan Nguyen*(東北大学)

キーワード: SiO2 pillars,reactive ion etching process,optical window,light transmittance,image sensor

要約(英語): This paper reports the fabrication of deep SiO2 pillar structures by using a reactive ion etching (RIE) system. Moreover, an application of the SiO2 pillars with and without liquid penetration has been demonstrated for an optical modulator and its optical characteristic is evaluated. An optical window consists of high aspect ratio SiO2 pillars that can modulate the transmission light intensity by moving a liquid in and out of the spaces between pillars. SiO2 pillars together with smooth surfaces, vertical shapes (base angle ~ 89.5o) and high aspect ratio of 12 with a depth of 12 μm, diameter of 1 μm, and the pitch of two pillars of 2 μm have been achieved. The optical window integrated with an image sensor for an optical modulator has been successfully fabricated. The observed modulation range by integration on the image sensor is approximately 65% with and without liquid penetration.

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