貼り替え不要で２軸方向検出可能な８角形MOSFET型応力センサ

カテゴリ: 部門大会

論文No: 28pm3-A-1

グループ名: 第32回「センサ・マイクロマシンとその応用システム」シンポジウム論文集

発行日: 2015/10/21

タイトル(英語): No Reattaching and Biaxial Directions Detectable Octagonal MOSFET Stress Sensor

著者名: 原田 知親*，貝和 航陽，山崎 義人(山形大学)

キーワード: 応力センサ,8角形MOSFET,せん断応力

要約(英語): In this paper, we design, fabricate, and evaluate Octagonal MOSFET stress sensor for 2 di-rection strecc detection. In previous works, stress detection device or devices, such as resistor and etc., have to be reattached along stress direction for measurement, because most of the stress sensors can detect only one dimension. However, this device is not necessary to re-attach because this device has radial eight direction output terminals. As the results, we can realize that it is able to detect 2 dimensional stress directions.

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