Assembled comb-drive XYZ-microstage with large displacements for the 3D scanning stage of magnetic resonance force microscopy

カテゴリ: 部門大会

論文No: 29pm3-PS-047

グループ名: 第32回「センサ・マイクロマシンとその応用システム」シンポジウム論文集

発行日: 2015/10/21

タイトル(英語): Assembled comb-drive XYZ-microstage with large displacements for the 3D scanning stage of magnetic resonance force microscopy

著者名: 薛 高鵬*，戸田 雅也，小野 崇人(東北大学)

キーワード: Comb-Drive XYZ-microstage,Assembly technology,MRFM,Cryogenic measurements

要約(英語): It is demonstrated that the assembled XYZ-microstage with the glued DPPH sample can be applied into the vacuum chamber to construct the setup of MRFM measurements. The ESR magnetic resonance signals are abtained from the fiber-optic interferometer due to the the vibration of the cantilever, when the DPPH sample moves into the resonant slice region of the magnetic particle.

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