機械的に結合した容量型シリコンナノメカニカル振動子

カテゴリ: 部門大会

論文No: 30am2-PS-022

グループ名: 第32回「センサ・マイクロマシンとその応用システム」シンポジウム論文集

発行日: 2015/10/21

タイトル(英語): Mechanically coupled capacitive Si nano mechanical resonator

著者名: 島崎 剛*，小野 崇人(東北大学)

キーワード: ナノメカニカル,等価直列容量,等価直列抵抗,機械的結合

要約(英語): Nanomechanical resonators are studied for the application to sensors and oscillators. However, it is difficult to detect the vibration of the resonance capacitively because of its small capacitance and large motional resistance. Mechanical coupling of the resonators is considered as one of solutions for such problem. In this research, mechanically coupled nanomechanical resonator are designed, fabricated and measured.

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