AN ELECTRET-BASED IMPLANTABLE ENERGY HARVESTER WITH LIQUID CELLS (MEMS vs. 3D PRINTING FABRICATION)

カテゴリ: 部門大会

論文No: 31pm3-PS-18

グループ名: 第34回「センサ・マイクロマシンとその応用システム」シンポジウム論文集

発行日: 2017/10/24

タイトル(英語): AN ELECTRET-BASED IMPLANTABLE ENERGY HARVESTER WITH LIQUID CELLS (MEMS vs. 3D PRINTING FABRICATION)

著者名: Chen Yu-Fan(National Taiwan University),Inoue Satoshi(東京大学),Toshiyoshi Hiroshi(東京大学)

著者名(英語): Yu-Fan Chen| Satoshi Inoue |Hiroshi Toshiyoshi

キーワード: Microfluidic,Energy harvesting,3D printing,PDMS,Electret

要約(日本語): An electret-based energy harvester has been demonstrated, and both MEMS (SU-8 spin-coated Si wafer) and 3D printing (3D printed frame) fabrication can be used for PDMS molding. An electret coated with a CYTOP layer is co

要約(英語): An electret-based energy harvester has been demonstrated, and both MEMS (SU-8 spin-coated Si wafer) and 3D printing (3D printed frame) fabrication can be used for PDMS molding. An electret coated with a CYTOP layer is combined with a PDMS micro chamber to form a liquid cell unit device.

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