スパッタPZT薄膜の微細加工およびMEMSへの応用

カテゴリ: 部門大会

論文No: 5PM1-E-1

グループ名: 【E】平成25年電気学会センサ・マイクロマシン部門大会講演論文集

発行日: 2013/10/29

タイトル(英語): Microfabrication technique of sputtered PZT thin films and application to MEMS

著者名: 神田　健介 (兵庫県立大学)

キーワード: PZT薄膜|スパッタ成膜|微細加工|MEMS|

要約(日本語): We address microfabrication technique of PZT thin films based on sputtering depositions and dry etchings. Inthis paper, the established fabrication process relevant techniques: (1) Series connection of PZT elements tooperate output voltages on the structure, (2) PZT/PZT bimorph structure for actuator, and (3) conformaldeposition of PZT thin film on a pre-etched substrate, are introduced.

要約(英語): We address microfabrication technique of PZT thin films based on sputtering depositions and dry etchings. Inthis paper, the established fabrication process relevant techniques: (1) Series connection of PZT elements tooperate output voltages on the structure, (2) PZT/PZT bimorph structure for actuator, and (3) conformaldeposition of PZT thin film on a pre-etched substrate, are introduced.

PDFファイルサイズ: 269 Kバイト