Micro-fluidic channel integration on thick-SOI LSI device for cells analyses.

カテゴリ: 部門大会

論文No: 5PM3-PSS-111

グループ名: 【E】平成25年電気学会センサ・マイクロマシン部門大会講演論文集

発行日: 2013/10/29

タイトル(英語): Micro-fluidic channel integration on thick-SOI LSI device for cells analyses.

著者名: Agnes Tixier-Mita (The University of Tokyo),Isao Mori (The University of Tokyo),Takuya Takahashi (The University of Tokyo),Yoshio Mita (The University of Tokyo),Hiroshi Toshiyoshi (The University of Tokyo),Olivier Francais (SATIE/IFR ENS Cachan),Bruno Le Pioufle (SATIE/IFR ENS Cachan)

キーワード: micro-channel Integration|cells analyses|bio-LSI|flow impedance cytometry|suspended electrodes

要約(日本語): The purpose of this article is to present the realization of an integrated micro-channel inside an LSI device, with possibility of suspended electrodes passing above it. Highly integrated device with micro-fluidic and batch processing of integrated microfluidic on LSI are the features of the proposed technology.

要約(英語): The purpose of this article is to present the realization of an integrated micro-channel inside an LSI device, with possibility of suspended electrodes passing above it. Highly integrated device with micro-fluidic and batch processing of integrated microfluidic on LSI are the features of the proposed technology.

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