宇宙応用のための昇温脱離式QCMセンサの開発

カテゴリ: 部門大会

論文No: 6PM3-PSS-066

グループ名: 【E】平成25年電気学会センサ・マイクロマシン部門大会講演論文集

発行日: 2013/10/29

タイトル(英語): Development of QCM-based thermal desorption spectroscopy for space applications

著者名: 飯田 尚之 (新潟大学),酒井 盾平 (新潟大学),寒川 雅之 (新潟大学),安部 隆 (新潟大学)

キーワード: QCM|昇温脱離ガス分析法|ガス状汚染物||

要約(日本語): In this paper, we report the development of QCM-based thermal desorption spectroscopy(TDS) for space applications. This sensor can determine chemical species. The sensor consists of a sensing resonator, a reference resonator and heater on the same substrate. By using this reference resonator, the influence of the temperature will be canceled. The previous study reported a QCM-based TDS using resonator which is excited by single side electrodes. However, it has problem that Q-factor is low. In this study, the QCM-based TDS was improved by using a resonator which is excited by both side electrodes. We succeeded to measure the peaks of desorption spectrum of methanol and ethanol by using the proposed sensor.

要約(英語): In this paper, we report the development of QCM-based thermal desorption spectroscopy(TDS) for space applications. This sensor can determine chemical species. The sensor consists of a sensing resonator, a reference resonator and heater on the same substrate. By using this reference resonator, the influence of the temperature will be canceled. The previous study reported a QCM-based TDS using resonator which is excited by single side electrodes. However, it has problem that Q-factor is low. In this study, the QCM-based TDS was improved by using a resonator which is excited by both side electrodes. We succeeded to measure the peaks of desorption spectrum of methanol and ethanol by using the proposed sensor.

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