水晶振動子式モノリシックメタノール濃度センサに関する理論解析

カテゴリ: 部門大会

論文No: 6PM3-PSS-072

グループ名: 【E】平成25年電気学会センサ・マイクロマシン部門大会講演論文集

発行日: 2013/10/29

タイトル(英語): Theoretical analysis of a QCR-based monolithic methanol concentration sensor

著者名: 渡部 尊 (新潟大学),石井 駿平 (新潟大学),外山 晋二郎 (新潟大学),寒川 雅之 (新潟大学),安部 隆 (新潟大学)

キーワード: 水晶振動子|櫛形コンデンサ|メタノール濃度センサ||

要約(日本語): In this paper, we report the theoretical analysis of a QCR-based monolithic methanol concentration sensor for fuel cell applications. Our sensor can detect a very small capacitance change with a resolution of sub fF. The fabricated sensor can measure a methanol concentration with a resolution of 0.008 wt%. In the present study, we found out optimized sensor design (QCR and IDC) for the substrate thickness and the range of the methanol concentration. By the use of analysis, the capacitive sensor with higher resolution can be realized, and this sensor can be expected to apply to various types of capacitive sensors.

要約(英語): In this paper, we report the theoretical analysis of a QCR-based monolithic methanol concentration sensor for fuel cell applications. Our sensor can detect a very small capacitance change with a resolution of sub fF. The fabricated sensor can measure a methanol concentration with a resolution of 0.008 wt%. In the present study, we found out optimized sensor design (QCR and IDC) for the substrate thickness and the range of the methanol concentration. By the use of analysis, the capacitive sensor with higher resolution can be realized, and this sensor can be expected to apply to various types of capacitive sensors.

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