A Long Bar Type Silicon Resonator with a High Quality Factor

カテゴリ: 部門大会

論文No: 7PM1-B-6

グループ名: 【E】平成25年電気学会センサ・マイクロマシン部門大会講演論文集

発行日: 2013/10/29

タイトル(英語): A Long Bar Type Silicon Resonator with a High Quality Factor

著者名: Nguyen Van Toan (Graduate School of Engineering,Tohoku University),Masaya Toda (Graduate School of Engineering,Tohoku University),Yusuke Kawai (Graduate School of Engineering,Tohoku University),Takahito Ono (Graduate School of Engineering,Tohoku University)

キーワード: silicon resonator|quality factor|silicon on insulator|low temperature co-fired ceramic|extensional mode

要約(日本語): This paper presents a long bar type silicon resonator with a high quality (Q) factor and an evaluation of the hermetic packaged device.

要約(英語): This paper presents a long bar type silicon resonator with a high quality (Q) factor and an evaluation of the hermetic packaged device.

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