Numerical study of the initial gas distribution on a gas jet plasma EUV source

カテゴリ: 部門大会

論文No: X-3

グループ名: 【A】平成23年電気学会基礎・材料・共通部門大会講演論文集

発行日: 2011/09/21

著者名: HuangBin (Tokyo Institute of Technology),JiangFei (Tokyo Institute of Technology),TomizukaTaku (Tokyo Institute of Technology),TakimotoYasuhiro (Tokyo Institute of Technology),WatanabeMasato (Tokyo Institute of Technology),HottaEiki (Tokyo Institute of Technology)

キーワード: numerical simulation| gas jet plasma| EUV source| gas distribution

要約(日本語): In this study, we investigate the initial gas distribution of the plasma jet and its effect on EUV output. A compressible gas model is employed.The viscosity effect of the gas/plasma is taken into account.

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