SELF-SENSING MAGNETIC SENSOR ON A HYBRID CANTILEVER OF MAGNETOSTRICTIVE AND PIEZOELECTRIC MATERIALS

カテゴリ: 研究会(論文単位)

論文No: BMS19054

グループ名: 【E】センサ・マイクロマシン部門 バイオ・マイクロシステム研究会

発行日: 2019/12/26

タイトル(英語): SELF-SENSING MAGNETIC SENSOR ON A HYBRID CANTILEVER OF MAGNETOSTRICTIVE AND PIEZOELECTRIC MATERIALS

著者名: INDIANTO MOHAMMAD AKITA(Graduate School of Engineering Tohoku University),TODA MASAYA(Graduate School of Engineering Tohoku University),ONO TAKAHITO(Graduate School of Engineering Tohoku University)

著者名(英語): MOHAMMAD AKITA INDIANTO(Graduate School of Engineering Tohoku University),MASAYA TODA(Graduate School of Engineering Tohoku University),TAKAHITO ONO(Graduate School of Engineering Tohoku University)

キーワード: Magnetostrictive|Piezoelectric|Cantilever|Resonance frequency|Q factor|Magnetic field|Magnetostrictive|Piezoelectric|Cantilever|Resonance frequency|Q factor|Magnetic field

要約(日本語): In this research, a cantilever with two layers of a magnetostrictive material of iron-gallium (FeGa) film and a piezoelectric material of lead zirconate titanate (PZT) film is fabricated and evaluated as a magnetic sensor. The vibration of the cantilever under the magnetic field is evaluated both optically using laser Doppler vibrometer (LDV) and electrically from the PZT film on the cantilever. The resonance frequency of the cantilever is shifted lower with the increment of the magnetic field with a sensitivity of 1.6 × 10-3 Hz/T, which gives a possibility for local and direct detection of the magnetic field in micro-scale without antenna structures.

要約(英語): In this research, a cantilever with two layers of a magnetostrictive material of iron-gallium (FeGa) film and a piezoelectric material of lead zirconate titanate (PZT) film is fabricated and evaluated as a magnetic sensor. The vibration of the cantilever under the magnetic field is evaluated both optically using laser Doppler vibrometer (LDV) and electrically from the PZT film on the cantilever. The resonance frequency of the cantilever is shifted lower with the increment of the magnetic field with a sensitivity of 1.6 × 10-3 Hz/T, which gives a possibility for local and direct detection of the magnetic field in micro-scale without antenna structures.

原稿種別: 英語

PDFファイルサイズ: 1,018 Kバイト