Development of a piezoelectric micromachined ultrasonic transducer using microfabrication technology -Aiming to realize the efficient induction of responses in local neural networks-

カテゴリ: 部門大会

論文No: PS1-4

グループ名: 【C】2021年電気学会電子・情報・システム部門大会

発行日: 2021/09/08

タイトル(英語): Development of a piezoelectric micromachined ultrasonic transducer using microfabrication technology -Aiming to realize the efficient induction of responses in local neural networks-

著者名: 古川 凌（北海道大学）,舘野 高（北海道大学）

著者名(英語): Ryo Furukawa (Hokkaido University),Takashi Tateno (Hokkaido University)

キーワード: 有限要素法|超音波刺激|微細加工技術|圧電型マイクロ超音波振動子|FEM|ultrasound stimulation|microfabrication technology|piezoelectric micromachined ultrasonic transducer

要約(日本語): Ultrasound (US) neuromodulation is expected to transcranially stimulate the local and deep areas of the brain for clinical applications. However, the mechanisms of actions underlying the stimulation are still unknown. We developed a piezoelectric micromachined US transducer (PMUT) to modulate the activity of brain slices at a micrometer scale. To examine the relationships between transducer size and the resonant frequency of voltage-driven oscillations, we modeled the multi-layered structure and performed numerical calculations. To monitor the transducer-driven activity, recording microelectrodes were fabricated into the PMUTs. We also measured the generated power of responsive oscillations. We discuss the possibility of our PMUT to stimulate the brain slices in our future applications.

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