Fabrication of Cantilever with FeGa/PZT Layers for Magnetic Field Sensor

カテゴリ: 部門大会

論文No: 20am2-PS3-35

グループ名: 【E】第36回「センサ・マイクロマシンと応用システム」シンポジウム

発行日: 2019/11/12

タイトル(英語): Fabrication of Cantilever with FeGa/PZT Layers for Magnetic Field Sensor

著者名: Indianto Mohammad Akita, 戸田 雅也, 小野 崇人(東北大学)

要約(日本語): In this research, the design and fabrication of cantilever with FeGa/PZT layers for magnetic field sensor are performed with sensivity of 1.6 x 10^4 Hz/T.

要約(英語): In this research, the design and fabrication of cantilever with FeGa/PZT layers for magnetic field sensor are performed. Coupling of magnetic sensing capability of magnetostrictive FeGa film and piezoelectric material of PZT film is proposed to develop magnetic field sensor which is small in size and has a good possibility for integration. It is found that the cantilever resonance frequency is depending on the magnetic field intensity with the sensitivity of 1.6 × 10^4 Hz/T

PDFファイルサイズ: 586 Kバイト