ELETROCHEMICAL DEPOSITED TBXDY(1-X)FEY THIN FILM EVALUATED FROM MICROACTUATOR

カテゴリ: 部門大会

論文No: 21pm1-PS3-11

グループ名: 【E】第36回「センサ・マイクロマシンと応用システム」シンポジウム

発行日: 2019/11/12

タイトル(英語): ELETROCHEMICAL DEPOSITED TBXDY(1-X)FEY THIN FILM EVALUATED FROM MICROACTUATOR

著者名: Shim Hang(Tohoku University), Sakamoto Kei(Tohoku University), Inomata Naoki(Tohoku University), Toda Masaya(Tohoku University), Van Toan Nguyen(Tohoku University), Song Yunheub(Hanyang University), Ono Takehito(Tohoku University)

要約(日本語): This paper presents the process technology of microstructures fabrication of a magnetostrictive thin film TbxDy(1-x)Fey for magnetic actuation

要約(英語): This paper presents the process technology of microstructures fabrication of a magnetostrictive thin film TbxDy(1-x)Fey for magnetic actuation, and the magnetostrictive actuation performances are evaluated. The film is deposited by electrodeposition using a three-electrodes system. Bi-material cantilever structures are fabricated and the magnetic actuation performances are evaluated. The actuators show high magnetostriction coefficients of approximately 1300 ppm at magnetic field 12300 Oe.

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