Piezoelectric MEMS actuator monolithically integrated with buried piezoresistors for position sensing

カテゴリ: 部門大会

論文No: 28P1-SS1-4

グループ名: 【E】第37回「センサ・マイクロマシンと応用システム」シンポジウム

発行日: 2020/10/19

タイトル(英語): Piezoelectric MEMS actuator monolithically integrated with buried piezoresistors for position sensing

著者名: Vergara Andrea(Tohoku University), 塚本 貴城(Tohoku University), Fang Weileun(National Tsing Hua University), 田中 秀治(Tohoku University)

要約(日本語): We have monolithically integrated a PZT thin film and buried piezoresistive sensors in a MEMS piezoelectric actuator. The developed fabrication process combines these two components successfully for the first time.

要約(英語): We have monolithically integrated a PZT thin film and buried piezoresistive sensors in a MEMS piezoelectric actuator. The developed fabrication process combines these two components successfully, as shown by SEM observation and SIMS analysis. Dynamic evaluation by LDV agrees with the simulation. The fabricated position sensor could successfully detect the oscillation with the sensitivity, non-linearity and noise floor of 0.037 mV/μm, 0.75% and 1×10-6 V/√Hz, respectively.

PDFファイルサイズ: 1,163 Kバイト