二段階封止接合を用いた小型原子時計のためのマイクロガスセル

カテゴリ: 部門大会

論文No: 9P2-SS1-1

グループ名: 【E】第38回「センサ・マイクロマシンと応用システム」シンポジウム

発行日: 2021/11/02

著者名: 西野 仁（多摩川ホールディングス）, 古屋 泰文（東北大学）, 小野 崇人（東北大学）

キーワード: MEMS|陽極接合|原子時計|CPT 共鳴|アルカリガスセル

要約(日本語): This paper reports the proposal, design, fabrication, and evaluation of transmission-typed Rb vapor cells sealed by two-step bonding for miniature atomic clocks. The sealing way employs a two-step bonding technique. First, only the surrounding of the wafer is sealed. Second, after the activation of a Rb dispenser to vaporize Rb atoms to the cell, the center part of the wafer is sealed. Rb atoms from one dispenser are vaporized into three vapor cells. In each cell, the absorption line of Rb is confirmed, and the CPT (Coherent Population Trapping) resonance is demonstrated. The FWHM of the CPT resonance fits almost the theoretical value in a vacuum. This means that the fabricated vapor cells are sealed with Rb without degassing and leak. This sealing way is useful for alkali vapor cells for miniature atomic clocks.

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