Recent Progress on Quartz MEMS Sensors

カテゴリ: 部門大会

論文No: 9P3-SS3-3

グループ名: 【E】第38回「センサ・マイクロマシンと応用システム」シンポジウム

発行日: 2021/11/02

著者名: Jinxing Liang（Southeast University, China）

要約(日本語): Alpha crystal quartz has a long history to be utilized as microdevice material due to its high temperature and frequency stability, excellent mechanical properties, high quality factor, piezoelectricity and so on. These complex unique propteries promise quartz material a competitive candidate especially in the high precision application fields. This review reports the recent research trends of typical quartz MEMS sensors, such as accelerometer, gyroscope, and some new applications for example quartz enhanced photothermal spectroscopy, density and viscosity measurements.

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