PZT MEMS Varifocal Lens using Gel or Liquid as Optical Media

カテゴリ: 部門大会

論文No: 14P3-D-3

グループ名: 【E】第39回「センサ・マイクロマシンと応用システム」シンポジウム

発行日: 2022/11/07

タイトル(英語): PZT MEMS Varifocal Lens using Gel or Liquid as Optical Media

著者名: 唐 正男(東北大学), 宗田 玲於(東北大学/Ecole des Mines de Saint-Etienne, FRANCE), ベルガラ アンドレア(東北大学), 鈴木 裕輝夫(東北大学), 田中 秀治(東北大学)

著者名(英語): Zhengnan Tang(Tohoku University), Leo Soda(Tohoku University/Ecole des Mines de Saint-Etienne, FRANCE), Andrea Vergara(Tohoku University), Yukio Suzuki(Tohoku University, JAPAN), Shuji Tanaka(Tohoku University)

キーワード: MEMS|varifocal lens|piezoelectric actuation|buried piezoresistors|feedback control|MEMS|varifocal lens|piezoelectric actuation|buried piezoresistors|feedback control

要約(日本語): In this research, a PZT MEMS varifocal lens is designed, fabricated, and evaluated. The novel proposed structure does not require hermetic sealing, and the PZT actuator’s maximum static displacement was about 15 μm under 40 V DC. The deflection amplitude

要約(英語): In this research, a PZT MEMS varifocal lens is designed, fabricated, and evaluated. The novel proposed structure does not require hermetic sealing, and the PZT actuator’s maximum static displacement was about 15 μm under 40 V DC. The deflection amplitude of the PZT cantilever was compared between equation, simulation, and real device and showed good agreement. Ionic gel and silicone oil have been tested as optical media so far. The optical power change was estimated to be about 15 times.

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