Highly Sensitive Hermetically Packaged Microsensor for Photoacoustic Detection

カテゴリ: 研究会(論文単位)

論文No: CHS18006

グループ名: 【E】センサ・マイクロマシン部門 ケミカルセンサ研究会

発行日: 2018/07/13

タイトル(英語): Highly Sensitive Hermetically Packaged Microsensor for Photoacoustic Detection

著者名: Latif Imran(Tohoku University Graduate School of Engineering),An Zhonglie(Tohoku University Graduate School of Engineering),Toda Masaya(Tohoku University Graduate School of Engineering),Ono Takahito(Tohoku University Graduate School of Engineering)

著者名(英語): Imran Latif(Tohoku University Graduate School of Engineering),Zhonglie An(Tohoku University Graduate School of Engineering),Masaya Toda(Tohoku University Graduate School of Engineering),Takahito Ono(Tohoku University Graduate School of Engineering)

キーワード: Photoacoustics|Micro-resonator|Glucose detection|Photoacoustics|Micro-resonator|Glucose detection

要約(日本語): This paper reports on the development of a highly sensitive hermetically packaged microsensor for photoacoustic detection. The microsensor employs a silicon micro-resonator as a sensing element which is fabricated with an SOI (Silicon on Insulator) wafer using standard microfabrication technology. The resonator is packaged in a high vacuum to achieve a high quality factor. The fabricated microsensor is then applied to photoacoustic detection of glucose samples in physiological concentration range against a gelatin matrix. Photoacoustic excitations in the samples are made using a near infrared pulsed laser diode. The experimental results reveal that the microsensor is highly sensitive to analyte concentrations.

要約(英語): This paper reports on the development of a highly sensitive hermetically packaged microsensor for photoacoustic detection. The microsensor employs a silicon micro-resonator as a sensing element which is fabricated with an SOI (Silicon on Insulator) wafer using standard microfabrication technology. The resonator is packaged in a high vacuum to achieve a high quality factor. The fabricated microsensor is then applied to photoacoustic detection of glucose samples in physiological concentration range against a gelatin matrix. Photoacoustic excitations in the samples are made using a near infrared pulsed laser diode. The experimental results reveal that the microsensor is highly sensitive to analyte concentrations.

原稿種別: 英語

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