Ultra-Wideband Surface Acoustic Wave Resonators Using Relaxor Based Ferroelectric Single Crystals

カテゴリ: 部門大会

論文No: TC1-5

グループ名: 【C】平成24年電気学会電子・情報・システム部門大会講演論文集

発行日: 2012/09/05

タイトル(英語): Ultra-Wideband Surface Acoustic Wave Resonators Using Relaxor Based Ferroelectric Single Crystals

著者名: Jing Chen(Chiba University),Jiansong Liu(Chiba University),Ken-ya Hashimoto (Chiba University),Tatsuya Omori(Chiba University),Changjun Ahn(Chiba University)

著者名(英語): Jing Chen(Chiba University),Jiansong Liu(Chiba University),Kenya Hashimoto(Chiba University),Tatsuya Omori(Chiba University),Changjun Ahn(Chiba University)

キーワード: 弾性表面波|リラクサ|共振子|強誘電体|SAW|relaxor|resonator|Ferroelectrics

要約(日本語): Tunable RF filters composed of wideband RF SAW/BAW resonators and variable capacitors are paid much attention. Their tuning range is inherently limited by the electromechanical coupling factor K2 of the piezoelectric material used for RF SAW/BAW resonators. In 2004, Nakamura et al theoretically studied acoustic properties on YX-PMN-PT substrate, and indicated existence of a shear-horizontal (SH)-type SAW with large K2 of about 50%. However, no experiment was reported.This paper reports realization of ultra-wideband SAW resonators on YX-PMN-PT substrate. It is shown that extremely large K2 is achievable experimentally as expected theoretically, and the spurious response due to the Rayleigh-type SAW can be suppressed by proper choice of the electrode material and its thickness.

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