Compensation of Flow Disturbance to Isolation Table by Estimated Disturbance Signal: Improvement of Repeatability

カテゴリ: 研究会(論文単位)

論文No: CT13017

グループ名: 【C】電子・情報・システム部門 制御研究会

発行日: 2013/03/04

タイトル(英語): Compensation of Flow Disturbance to Isolation Table by Estimated Disturbance Signal: Improvement of Repeatability

著者名: Shirani Habiburahman(東京農工大学),中村 幸紀(東京農工大学),涌井 伸二(東京農工大学)

著者名(英語): Shirani Habiburahman(Tokyo University of Agriculture and Technology),Nakamura Yukinori(Tokyo University of Agriculture and Technology),Wakui Shinji(Tokyo University of Agriculture and Technology)

要約(日本語): This paper considers compensation of flow disturbance to pneumatic isolation table by estimated disturbance signal which is estimated by a disturbance observer. The S-function and program codes are built that can inject the estimated signal from workspace through a compensator to servo valve for compensation of actual flow disturbance.

要約(英語): This paper considers compensation of flow disturbance to pneumatic isolation table by estimated disturbance signal which is estimated by a disturbance observer. The S-function and program codes are built that can inject the estimated signal from workspace through a compensator to servo valve for compensation of actual flow disturbance.

原稿種別: 日本語

PDFファイルサイズ: 1,336 Kバイト