Formation of Periodic Micro/Nanostructures on Silicone Rubber Surface by ArF Excimer Laser

カテゴリ: 部門大会

論文No: OS3-3

グループ名: 【C】平成28年電気学会電子・情報・システム部門大会講演論文集

発行日: 2016/08/31

タイトル(英語): Formation of Periodic Micro/Nanostructures on Silicone Rubber Surface by ArF Excimer Laser

著者名: Okoshi Masayuki(防衛大学校),Wisnu Setyo Pambudi(防衛大学校),Yamashita Tsugito(関東学院大学)

著者名(英語): Okoshi Masayuki|Wisnu Setyo Pambudi|Yamashita Tsugito

キーワード: Micro/nanostructure|Silicone rubber|ArF excimer laser|Super-hydrophobic property

要約(日本語): Single layer of silica glass microspheres 2.5 micron in diameter was formed on silicone rubber surface, then a 193 nm ArF excimer laser irradiated the sample surface at the single-pulse laser fluence of 10 mJ/cm2 and for 60 min irradiation. The pulse repetition rate was 1 Hz. The silicone rubber surface underneath each microsphere selectively swelled during the ArF laser irradiation, of which also found to be periodical at regular intervals of approximately 2.5 micron and 1.3 micron in height. Contact angle of water was measured by the Low Bond Axisymmetric Drop Shape Analysis to be approximately 150 degrees and over on the micro/nanostructured silicone, indicating a clear super hydrophobic property.

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