Principle of the Base Plate Jerk Feedback in a Pneumatic Positioning Stage

カテゴリ: 部門大会

論文No: 2-56

グループ名: 【D】平成22年電気学会産業応用部門大会講演論文集

発行日: 2010/08/23

タイトル(英語): Principle of the Base Plate Jerk Feedback in a Pneumatic Positioning Stage

著者名: Wali Mohebullah(Tokyo University of Agriculture and Technology),Komiya Hideaki(Tokyo University of Agriculture and Technology),Nakamura Yukinori(Tokyo University of Agriculture and Technology),Wakui Shinji(Tokyo University of Agriculture and Technology)

著者名(英語): Mohebullah Wali(Tokyo University of Agriculture and Technology),Hideaki Komiya(Tokyo University of Agriculture and Technology),Yukinori Nakamura(Tokyo University of Agriculture and Technology),Shinji Wakui(Tokyo University of Agriculture and Technology)

キーワード: Pneumatic positioning stage|Base plate acceleration (B.P.Acc)|Base plate jerk feedback|Spring-type coil isolator| Pneumatic positioning stage|Base plate acceleration (B.P.Acc)|Base plate jerk feedback|Spring-type coil isolator

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