Oxide Layer Removal Speed of Vacuum Arc Cathode Spot Applied by Alternating Magnetic Field

カテゴリ: 研究会(論文単位)

論文No: EPP19086

グループ名: 【A】基礎・材料・共通部門 放電・プラズマ・パルスパワー研究会

発行日: 2019/07/24

タイトル(英語): Oxide Layer Removal Speed of Vacuum Arc Cathode Spot Applied by Alternating Magnetic Field

著者名: Masashi Shimazaki(Tokyo City University),Yuriko Takeda(Tokyo City University),Yoshifumi Maeda(Tokyo City University ),Kenji Suzuki(Tokyo City University),Toru Iwao(Tokyo City University)

著者名(英語): Shimazaki Masashi(Tokyo City University),Takeda Yuriko(Tokyo City University),Maeda Yoshifumi(Tokyo City University),Suzuki Kenji(Tokyo City University),Iwao Toru(Tokyo City University)

キーワード: ａｒｃ　ｄｉｓｃｈａｒｇｅ|ｃａｔｈｏｄｅ　ｓｐｏｔ|ｏｘｉｄｅ　ｌａｙｅｒ　ｒｅｍｏｖａｌ|ｉｍａｇｅ　ｐｒｏｃｅｓｓｉｎｇ|ｐｌａｓｍａ|ａｌｔｅｒｎａｔｉｎｇ　ｍａｇｎｅｔｉｃ　ｆｉｅｌｄ|arc discharge|cathode spot|oxide layer removal|image processing|plasma|alternating magnetic field

要約(日本語): The movement of the vacuum arc cathode spot is random manner. For this reason, the movement in the single direction can be controlled by applying the transverse magnetic ?eld. However, the range of surface treatment can not be broadened because it is the single direction. Therefore, the back and forth movement of the cathode spot should be needed to control to apply the alternating magnetic ?eld. In this paper, the movement of cathode spot applied by the alternating magnetic ?eld was elucidated. As a result, the movement of the cathode spot went back and forth, and the speed did not change with changing the magnetic ?eld.

要約(英語): The movement of the vacuum arc cathode spot is random manner. For this reason, the movement in the single direction can be controlled by applying the transverse magnetic ?eld. However, the range of surface treatment can not be broadened because it is the single direction. Therefore, the back and forth movement of the cathode spot should be needed to control to apply the alternating magnetic ?eld. In this paper, the movement of cathode spot applied by the alternating magnetic ?eld was elucidated. As a result, the movement of the cathode spot went back and forth, and the speed did not change with changing the magnetic ?eld.

原稿種別: 英語

PDFファイルサイズ: 1,331 Kバイト