衝突輻射モデルに基づく低気圧マイクロ波放電Heプラズマの電子温度と電子密度の発光分光計測

カテゴリ: 研究会(論文単位)

論文No: EPP20046

グループ名: 【A】基礎・材料・共通部門 放電・プラズマ・パルスパワー研究会

発行日: 2020/07/16

タイトル(英語): Electron Temperature and Density Diagnostics of Low-Pressure Microwave Discharge Helium Plasma by OES Measurement Based on Collisional Radiative Model

著者名: 林 珂任(東京工業大学),根津 篤(東京工業大学),赤塚 洋(東京工業大学)

著者名(英語): Keren Lin (Tokyo Institute of Technology),Atsushi Nezu(Tokyo Institute of Technology),Hiroshi Akatsuka(Tokyo Institute of Technology)

キーワード: 低気圧マイクロ波放電ヘリウムプラズマ|衝突輻射モデル|発行分光計測|電子温度|電子密度|low-pressure microwave discharge helium plasma|collisional radiative model|optical emission spectroscopy|electron temperature|electron density

要約(日本語): A numerical model is created to determine electron number density and temperature with OES measurement based on the collisional radiative model of helium plasma. The elementary processes of levels 31S, 33S, and 31D are extracted to obtain a simplified rel

要約(英語): A numerical model is created to determine electron number density and temperature with OES measurement based on the collisional radiative model of helium plasma. The elementary processes of levels 31S, 33S, and 31D are extracted to obtain a simplified relationship. Procedures of the OES measurement is demonstrated for a low-pressure microwave discharge helium plasma.

原稿種別: 英語

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